| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment device in which ozone and ultraviolet light are combined by treating high concentration ozone by a simple method.SOLUTION: The ozone surface treatment device comprises: a treatment chamber installed with an opening/closing door, an ozone generating source, an ultraviolet light source of radiating ultraviolet light, an ozone decomposer 1 of radiating ultraviolet light in a wavelength region with an ozone decomposition action, a sensor of detecting ozone concentration and a sample stand to be arranged with the object to be treated; and a controller of performing the driving control of the ozone generating source, the ultraviolet light source and the ozone decomposer 1 and the opening/closing control of the opening/closing door. In the ozone surface treatment device, the opening/closing door is locked to simultaneously operate the ozone generating source, the ultraviolet light source and the ozone decomposer 1, thus surface treatment is practiced. The decomposition treatment of ozone is practiced by driving only the ozone decomposer 1 after the completion of the surface treatment, and, when the sensor detects the lowering of the ozone concentration in the treatment chamber to a prescribed value, the lock of the opening/closing door is released. |
