ELECTRON MICROSCOPE

摘要

This electron microscope is characterized by being provided with: an annular first detector that has position resolution and is disposed at an image-formation position at which electrons that have diffracted off of and passed through a sample (17) form an image when an electron beam (15) generated by an electron source is radiated at the sample; and a second detector that forms a transmission electron image by detecting the transmitted electron beam that has passed through the center of the annular section. The electron microscope is further characterized by acquiring the electron beam diffraction image (19) of the sample by means of the first detector, and forming a transmission electron image (18) of the sample by means of the second detector. As a result, it is possible to achieve an electron microscope that can simultaneously observe a diffraction pattern and a transmission image.