SUPPLY APPARATUS WHICH SUPPLIES RADICALS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

摘要

A supply apparatus for supplying radicals includes: a generator arranged in a chamber and configured to generate radicals by activating a gas supplied into the chamber; and a transport pipe having one end connected to the chamber and the other end from which the generated radicals are discharged. The generator is configured to activate the gas with infrared light radiation accompanied. An inner surface of the transport pipe is formed into a patterned shape by which the infrared light exiting the other end is less than the infrared light entering the one end.