发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 The present invention discloses a semiconductor device and a method for manufacturing the semiconductor device. The semiconductor device includes a gate insulating layer formed on an inner wall of a substrate recess, a work function material layer formed on the gate insulating layer so as to apply a tensile stress or a compressive stress to a channel of a MOS field-effect transistor, and a gate metal formed on the work function material layer. The method for manufacturing the semiconductor device includes forming a work function material layer on a gate insulating layer so as to apply a tensile stress or a compressive stress to a channel of a MOS field-effect transistor, wherein the gate insulating layer is formed on an inner wall of a substrate recess, and depositing a gate metal on the work function material layer.
申请公布号 US2014110778(A1) 申请公布日期 2014.04.24
申请号 US201313940095 申请日期 2013.07.11
申请人 SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORPORATION (SHANGHAI) 发明人 FUMITAKE MIENO
分类号 H01L29/423;H01L29/40 主分类号 H01L29/423
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