发明名称 |
FABRICATING METHOD FOR ABSORBER LAYER OF SOLAR CELL AND ABSORBER LAYER FABRICATED BY THAT |
摘要 |
The present invention discloses a fabricating method of a precursor of a solar cell and a light absorption layer manufactured thereby capable of reducing the stress of a thin film and the loss of indium and preventing gallium from being segregated to the molybdenum of a substrate after the separation. For example, the fabricating method of the light absorption layer of a CIS (CuInSe2) solar cell comprises; an indium selenide evaporation step of forming indium selenide (In2Se3) as a target and evaporating the indium selenide on the top of the substrate through a sputtering process; a copper gallium and copper selenide evaporation step of forming copper gallium (CuGa) and copper selenide (Cu2Se) as a target and evaporating the copper gallium (CuGa) and the copper selenide (Cu2Se) on the top of the substrate through the sputtering process. [Reference numerals] |
申请公布号 |
KR101385674(B1) |
申请公布日期 |
2014.04.24 |
申请号 |
KR20130012025 |
申请日期 |
2013.02.01 |
申请人 |
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY |
发明人 |
JEONG, CHAE HWAN;KIM, CHAE WOONG;PARK, IN SUN |
分类号 |
H01L31/0749;H01L31/042;H01L31/18 |
主分类号 |
H01L31/0749 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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