发明名称 GAS FLOW PATH MEMBER IN GAS TREATMENT APPARATUS, AND GAS DETECTOR
摘要 PROBLEM TO BE SOLVED: To provide: a gas flow path member capable of surely and easily connecting a gas device to a gas inflow part or a gas outflow part; and a gas detector capable of easily forming a predetermined gas piping structure and obtaining high maintenance performance.SOLUTION: This gas flow path member comprises a gas flow path for connecting a plurality of gas devices to each other used in a gas treatment apparatus. The gas flow path member is formed with a plurality of flow path chambers mutually partitioned, each of which is formed with a gas inflow part and a gas outflow part opening on a front surface or on a rear surface, between a front surface plate and a rear surface plate mutually connected and fixed. In two mutually adjacent flow path chambers, the gas devices are connected to a gas inflow part of one flow path chamber and a gas outflow part of the other flow path chamber. A gas sensor and a pump are connected to each other by the above gas flow path member.
申请公布号 JP2014074647(A) 申请公布日期 2014.04.24
申请号 JP20120222129 申请日期 2012.10.04
申请人 RIKEN KEIKI CO LTD 发明人 YAMADA KENTARO
分类号 G01N27/00;F16L41/00;G01N1/00;G01N27/16 主分类号 G01N27/00
代理机构 代理人
主权项
地址