发明名称 METHOD FOR MANUFACTURING NITRIDE-BASED CERAMIC SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a nitride-based ceramic substrate which does not require a thermal treatment step of reducing deformation after a sintering step, can suppress deformation after the sintering step, and can prevent sheet moldings laminated at sintering from being stuck to each other.SOLUTION: A separation layer is formed on one principal surface of a sheet molding so that its area is 95% or less of the area of the principal surface, and the sheet molding is sintered at 1,700-2,000°C in a state where a plurality of sheet moldings are superposed on each other through the separation layer to manufacture a nitride-based ceramic substrate.
申请公布号 JP2014073919(A) 申请公布日期 2014.04.24
申请号 JP20120221075 申请日期 2012.10.03
申请人 HITACHI METALS LTD 发明人 KAGA YOICHIRO;WATANABE JUNICHI
分类号 C04B35/64;C04B35/58;C04B35/584;H05K3/46 主分类号 C04B35/64
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