发明名称
摘要 A semiconductor device including semiconductor material having a bend and a trench feature formed at the bend, and a gate structure at least partially disposed in the trench feature. A method of fabricating a semiconductor structure including forming a semiconductor material with a trench feature over a layer, forming a gate structure at least partially in the trench feature, and bending the semiconductor material such that stress is induced in the semiconductor material in an inversion channel region of the gate structure.
申请公布号 JP5479908(B2) 申请公布日期 2014.04.23
申请号 JP20090537414 申请日期 2007.11.20
申请人 发明人
分类号 H01L29/786;H01L21/336;H01L21/8234;H01L21/8238;H01L27/08;H01L27/088;H01L27/092 主分类号 H01L29/786
代理机构 代理人
主权项
地址