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经营范围
发明名称
Rotary table for entraining substrates when depositing thin layer to exposed surface of substrates
摘要
申请公布号
CZ26777(U1)
申请公布日期
2014.04.23
申请号
CZ20140029281U
申请日期
2014.02.26
申请人
HVM PLASMA, SPOL.S R.O.
发明人
KADLEC STANISLAV;PLÍHAL PETR;VYSKO&Ccaron,IL JI&Rcaron,Í
分类号
C23C14/34;C23C14/50
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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