| 摘要 |
<p>The component (10) has an acoustic permeable counter element (12) including a counter electrode (22). A feeding unit feeds charging voltage between a membrane (11) and the electrode. Another acoustic permeable counter element (13) is provided with a compensation electrode (33). The membrane is arranged between the electrode and the compensation electrode, and another feeding unit feeds compensation voltage between the electrodes. The compensation voltage is regulated independent of the charging voltage and voltage that is changed based on deflection between the membrane and counter electrodes. Independent claims are also included for the following: (1) a method for operating a component with a micromechanical microphone structure (2) a method for manufacturing a component with a micromechanical microphone structure.</p> |
