| 摘要 |
The present invention relates to an apparatus for opening and closing a load port semiconductor wafer cassette door in a semiconductor apparatus. The present invention, though a latch lever fixing screw comes loose according as a door repeatedly is opened and closed, maintains a state that a latch lever is inserted into a latch lever support hole forming a latch lever coupling unit, prevents the latch lever from moving in an axial direction of a latch axis with respect to a latch axis, and accordingly, precisely opens and closes the door by correctly realizing a rotating operation of the latch lever with respect to the latch axis. The present invention, in the case that an external force such as a vibration is applied to a bracket, a cylinder fixing screw and a looseness preventing plate forming a cylinder fixing unit in a process that repeated door opening and closing operations affect a main body of a cylinder, inserts a square shaped head part of the cylinder fixing screw into a square shaped looseness preventing hole of the looseness preventing plate, and unless the fixing screw for fixing the looseness preventing plate at the bracket is completely unfastened and the looseness preventing plate is separated from the bracket, prevents the cylinder fixing screw from arbitrarily coming loose. Though the door opening and closing operations repeat for a long time, the present invention prevents a fixing state of a pneumatic cylinder and a coupling state of the latch lever with respect to the latch axis from being changed, and correctly opens and closes the door, thereby capable of definitely preventing accidents such as shutdown of a semiconductor manufacturing facility and a damage to a wafer. |
