| 摘要 |
PURPOSE: A spin chuck device for a single wafer treating machine is provided to control center shaft rotation and a chuck pin selectively by improving a simple structure between a chuck and a rotating member. CONSTITUTION: A spin chuck device for a single wafer treating machine is composed a chuck, a rotation member, a chuck pin, a driving shaft member, and a cam member. The chuck(110) provides a holding surface for supporting a wafer, and a plurality of chuck pins(130) is mounted at the chuck supporting plane so that they are exposed to the outside partly. The plural chuck pins are separated from the rotation member physically, and the driving shaft member(140) delivers a rotation to the rotating member. The cam member is formed with a chuck pin as one body and is connected with a cam body rotating around the same shaft. |
