| 摘要 |
The present invention relates to a pre-wetting device capable of performing pre-wetting for a substrate. The present invention comprises a pre-wetting unit and a liquid providing unit. The pre-wetting unit is accessed and separated to a chuck which rotates in a state of chucking the substrate. The pre-wetting unit performs the pre-setting for the substrate. The liquid providing unit is connected to the pre-wetting unit and offers liquid for the pre-wetting of the substrate to the pre-wetting unit. The pre-wetting unit comprises a pre-wetting body and a spray unit. An upper part of the pre-wetting body is opened. The pre-wetting body forms a receiving space which receives the substrate. The spray unit is installed in the pre-wetting body and sprays the liquid to the substrate. A part of the liquid is stored in the receiving space. The pre-wetting is performed in a state of the soak of the substrate. The present invention is provided to firstly perform the pre-wetting for the substrate by spraying the liquid to a substrate direction and soak the substrate in the liquid, thereby improving a soak effect of the substrate. |
