发明名称 |
Octopole device and method for spot size improvement |
摘要 |
A method of compensating mechanical, magnetic and/or electrostatic inaccuracies in a scanning charged particle beam device is described. The method includes an alignment procedure, wherein the following steps are conducted: compensating 4-fold astigmatism with an element having at least 8-pole compensation capability, wherein the aligning and compensating steps of the alignment procedure act on a charged particle beam with beam dimensions in two orthogonal directions each of at least 50 µm and coaxially aligned with at least the element having at least the 8-pole compensation capability. ( Fig. 1 ) |
申请公布号 |
EP2722868(A1) |
申请公布日期 |
2014.04.23 |
申请号 |
EP20120188686 |
申请日期 |
2012.10.16 |
申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH |
发明人 |
KRAMER, ALEKSANDRA;LANIO, STEFAN |
分类号 |
H01J37/153 |
主分类号 |
H01J37/153 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|