| 摘要 |
The present invention relates to a manufacturing method of carbon coils using sulphur hexafluoride (SF6) gas which synthesizes micro/nano coils having various shapes on a substrate and grows by changing an injection flow rate, injection time, and injection timing of SF6 gas when manufacturing carbon coils. In a method of synthesizing carbon coils on a substrate and growing using a chemical vapor pressure equipment, provided is a manufacturing method of carbon coils using SF6 which adjusts a shape, length, geometry of carbon coils by injecting SF6, C2H2, and H2 gas in a chamber, but controlling one or more of an injection flow rate, injection time, or injection timing of SF6 gas, when synthesizing the carbon coils. [Reference numerals] (AA) Start; (BB) Contact; (CC) Non-contact(Hovering); (DD) End |
