| 摘要 |
PURPOSE: A chuck pin for a spin chuck device is provided to add a core of metal material to a bottom driving part by manufacturing the bottom driving part of high price. CONSTITUTION: A chuck pin(130) for a spin chuck device includes a chuck, a rotary member, a bottom driving part, a top eccentric part, and a fixing member. The chuck(110) supports a wafer. The rotary member is relatively rotated about the chuck. The bottom driving part(132) is mounted inside the chuck. The bottom driving part is engaged with the rotary member. The top eccentric part(134) is separately manufactured with the bottom driving part. The top eccentric part is provided on the bottom driving part in order to be positioned on a top surface of the chuck. The fixing member fixes the bottom driving part and the top eccentric part. |
