| 摘要 |
The purpose of the present invention is to simplify an arrangement step and a structure of a device for fixing a graphene sheet and a mask to maintain the arranged state of the graphene sheet and the mask and to simplify a process step for forming patterns on the graphene sheet. For this, the invention includes a vacuum unit (100) including a body (110), a vacuum chamber (120) formed in the center of the body, a vacuum absorber (130) forming vacuum in the vacuum chamber (120), multiple arrangement pins (142) moving up and down through the body (110) and formed in the edge of the body (110), and an up and down cylinder (140) moving the arrangement pins (142) up and down, a jig plate (200) composed of a gas hole plate (210) having a plurality of gas holes (211) on a part corresponding to the vacuum chamber (120) and having a plurality of first through holes (220) on the body (110) into which the arrangement pins (142) are inserted, a graphene sheet (300) placed on the arrangement pins (142) by forming a plurality of second through holes (320) smaller than the first through holes on positions corresponding to the first through holes (220), and a mask (400) placed on the arrangement pins (142) by forming a plurality of third through holes smaller than the second through holes (320) on positions corresponding to the second through holes (320). |
