SYSTEM OF MEASURING WARPAGE AND MENTOD OF MEASURING WARPAGE

摘要

The present invention relates to a system for measuring a warpage, and a method for measuring a warpage. Regarding the system for measuring a warpage, wherein a light irradiated from a light source and reflected from the surface of a sample reaches a camera through a reference grid unit, and the warpage of the sample is measured by analyzing the images taken in the camera, an inhalant unit for removing smoke generated from the sample is included. Therefore, the smoke generated from the sample, as the temperature of the sample rises when measuring the warpage, can be effectively removed, at the same time conducting the measurement of the warpage. Thereby, the accuracy of the warpage measurement can be improved. [Reference numerals] (100) Control unit; (400) Camera; (500) Light source; (600) Server