发明名称 Sealing glass for semiconductor device, sealing material, sealing material paste, and semiconductor device and its production process
摘要 A sealing glass, a sealing material, and a sealing material paste, which suppress metal deposition by reducing glass components (metal oxides) without decreasing the reactivity with and the adhesion to a semiconductor substrate. The sealing glass, contains a low temperature melting glass containing, by mass ratio: from 0.1 to 5% of at least one metal oxide selected from the group consisting of Fe, Mn, Cr, Co, Ni, Nb, Hf, W, Re, a rare earth element, and optionally Mo; and from 5 to 100 ppm by mass ratio of K2O, wherein the low temperature melting glass has a softening point of at most 430° C. The sealing material device, contains the sealing glass and an inorganic filler in an amount of from 0 to 40% by volume ratio. The sealing material paste contains a mixture of the sealing material and a vehicle.
申请公布号 US8704361(B2) 申请公布日期 2014.04.22
申请号 US201213362690 申请日期 2012.01.31
申请人 TAKAHASHI HIROKI;ASAHI GLASS COMPANY, LIMITED 发明人 TAKAHASHI HIROKI
分类号 H01L23/10;B28B11/00 主分类号 H01L23/10
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