发明名称 Method for manufacturing solid state image forming device, and solid state image forming device
摘要 A method for manufacturing a solid state image forming device in one embodiment includes forming a transparent resin layer on a semiconductor substrate having a plurality of photodiode layers formed thereon in a lattice, through R, G, and B color filters that are formed according to a Bayer arrangement; forming a plurality of first microlens mother dies on the transparent resin layer at the positions corresponding to the G color filters in such a manner that the outer peripheries thereof are separated from each other; forming a plurality of second microlens mother dies in such a manner that they are formed to fill the gap between the first microlens mother dies and the outer peripheries thereof are separated from each other; and etching the transparent resin layer with the plurality of first microlens mother dies and the plurality of second microlens mother dies being used as masks.
申请公布号 US8704323(B2) 申请公布日期 2014.04.22
申请号 US201313778406 申请日期 2013.02.27
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 OOTAKE HAJIME
分类号 H01L21/00;H01L27/146 主分类号 H01L21/00
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