发明名称 METHOD OF MAKING A FINFET DEVICE
摘要 The present disclosure provides many different embodiments of fabricating a FinFET device that provide one or more improvements over the prior art. In one embodiment, a method of fabricating a FinFET includes providing a semiconductor substrate and a plurality of dummy fins and active fins on the semiconductor substrate. A predetermined group of dummy fins is removed.
申请公布号 KR101388329(B1) 申请公布日期 2014.04.22
申请号 KR20120104415 申请日期 2012.09.20
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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