| 摘要 |
A wet station and an operating method thereof is provided to prevent a remaining diluted solution from flowing to the outside when separating a measuring device by drying the measuring device with the gas supplied from a gas supply unit after the measuring device is diluted. A wet station includes a cleaning bath(110) with a cleaning solution, a circulation line(200), a bypass line(300), a measuring unit(310), and a diluted solution supply unit(410). The circulation line is connected to the cleaning bath and circulates the cleaning solution. The bypass line is connected to the circulation line and bypasses a part of the cleaning solution circulated through the circulation line to the cleaning bath. The measuring unit is mounted on the bypass line and measures the characteristic of the cleaning solution flowing in the bypass line. The diluted solution supply unit is connected to the bypass line to be arranged in an inlet of the measuring unit and selectively supplies the diluted solution. |
