发明名称 Methods and apparatus for calculating electromagnetic scattering properties of a structure using a normal-vector field and for reconstruction of approximate structures
摘要 A projection operator framework is described to analyze the concept of localized normal-vector fields within field-material interactions in a spectral basis, in isotropic and anisotropic media. Generate a localized normal-vector field n in a region of the structure defined by the material boundary, decomposed into sub-regions with a predefined normal-vector field and possibly corresponding closed-form integrals. Construct a continuous vector field F using the normal-vector field to select continuous components ET and Dn. Localized integration of normal-vector field n over the sub-regions to determine coefficients of, C. Determine components Ex, Ey, Ez of the electromagnetic field by using field-material interaction operator C to operate on vector field F. Calculate electromagnetic scattering properties of the structure using the determined components of the electromagnetic field.
申请公布号 US8706455(B2) 申请公布日期 2014.04.22
申请号 US20100905447 申请日期 2010.10.15
申请人 VAN BEURDEN MARTIJN CONSTANT;SETIJA IRWAN DANI;DIRKS REMCO;ASML NETHERLANDS B.V. 发明人 VAN BEURDEN MARTIJN CONSTANT;SETIJA IRWAN DANI;DIRKS REMCO
分类号 G06F7/60;G06G7/48;G06G7/56 主分类号 G06F7/60
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