发明名称 |
Methods and apparatus for calculating electromagnetic scattering properties of a structure using a normal-vector field and for reconstruction of approximate structures |
摘要 |
A projection operator framework is described to analyze the concept of localized normal-vector fields within field-material interactions in a spectral basis, in isotropic and anisotropic media. Generate a localized normal-vector field n in a region of the structure defined by the material boundary, decomposed into sub-regions with a predefined normal-vector field and possibly corresponding closed-form integrals. Construct a continuous vector field F using the normal-vector field to select continuous components ET and Dn. Localized integration of normal-vector field n over the sub-regions to determine coefficients of, C. Determine components Ex, Ey, Ez of the electromagnetic field by using field-material interaction operator C to operate on vector field F. Calculate electromagnetic scattering properties of the structure using the determined components of the electromagnetic field. |
申请公布号 |
US8706455(B2) |
申请公布日期 |
2014.04.22 |
申请号 |
US20100905447 |
申请日期 |
2010.10.15 |
申请人 |
VAN BEURDEN MARTIJN CONSTANT;SETIJA IRWAN DANI;DIRKS REMCO;ASML NETHERLANDS B.V. |
发明人 |
VAN BEURDEN MARTIJN CONSTANT;SETIJA IRWAN DANI;DIRKS REMCO |
分类号 |
G06F7/60;G06G7/48;G06G7/56 |
主分类号 |
G06F7/60 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|