发明名称 PARTICLE BEAM SYSTEM.
摘要 <p>The system has an electron receiving surface (29) arranged proximate to an object plane (27) as a main plane (67) of an objective lens (39). A light exit surface (55) is arranged far distant from the object plane than the main plane. A maximum cross sectional area of a light guide body (23) of a scintillator arrangement (21) in a vertically oriented plane is two times larger than a surface area of the surface. A maximum expansion of the area in the oriented plane is smaller than distance between the object plane at a nearest arranged location of the surface and the oriented plane.</p>
申请公布号 NL2012566(A) 申请公布日期 2014.04.22
申请号 NL20142012566 申请日期 2014.04.04
申请人 CARL ZEISS NTS GMBH 发明人 ZEIDLER DIRK;KEMEN THOMAS
分类号 H01J37/244;H01J37/28 主分类号 H01J37/244
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