发明名称 |
Thermally conductive sheet and substrate mounting device including same |
摘要 |
A thermally conductive sheet is used between a mounting table for mounting thereon a target substrate and an annular focus ring mounted on the mounting table to surround a circumferential peripheral portion of the target substrate. Further, the mounting table includes therein a cooling unit and is disposed in a depressurized accommodating chamber for accommodating therein the target substrate. The thermally conductive sheet has a non-adhesive layer on each of one or more surfaces thereof. |
申请公布号 |
US8702903(B2) |
申请公布日期 |
2014.04.22 |
申请号 |
US20080055633 |
申请日期 |
2008.03.26 |
申请人 |
MIYAGAWA MASAAKI;YOSHIMURA AKIHIRO;TOKYO ELECTRON LIMITED |
发明人 |
MIYAGAWA MASAAKI;YOSHIMURA AKIHIRO |
分类号 |
C23C16/50;C23C16/00;C23F1/00;H01L21/306 |
主分类号 |
C23C16/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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