Height measurement by correlating intensity with position of scanning object along optical axis of a structured illumination microscope

摘要

A method for imaging an object using a microscope includes obtaining axial response data, the axial response data representative of a relationship between a separation between a top surface of the object and an objective lens of the microscope and an intensity of light reflected by the top surface of the object; positioning the object at a distance from the objective lens that is within a linear region of the axial response data; sequentially illuminating the object with a plurality of periodic patterns; obtaining a plurality of images of the object, each image resulting from the illumination of the object with a corresponding one of the plurality of periodic patterns; determining a reconstructed image of the object based on the plurality of images of the object; and, based on variations in the intensity of the reconstructed image, determining a topographic profile of the top surface of the object.