| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma processing apparatus preventing a harmful component from being discharged to the outside in atmospheric pressure plasma processing of a workpiece.SOLUTION: A plasma processing apparatus for performing discharge processing of a workpiece under pressure near the atmospheric pressure, comprises: a discharge chamber; a gas introduction port for introducing a gas to the discharge chamber; a gas exhaust port for discharging the gas introduced to the discharge chamber; a workpiece introduction port provided in one end of the discharge chamber; a workpiece lead-out port provided in the other end of the discharge chamber; at least one electrode pair provided inside the discharge chamber; and transfer means for introducing the workpiece from the workpiece introduction port into the discharge chamber, passing the workpiece through between electrodes of the electrode pair, and then transferring the workpiece from the workpiece lead-out port to a downstream direction of the discharge chamber. The workpiece lead-out port is formed so as to have an opening larger than that of the workpiece introduction port. |
