发明名称 ACCELERATION SENSOR, AND DETECTION SECTION STRUCTURE AND DETECTION SECTION OF THE SAME
摘要 PROBLEM TO BE SOLVED: To downsize a detection section while keeping the signal strength of the detection section in an acceleration sensor having a multi-axial sensitivity detection function.SOLUTION: A detection section structure 10 includes: a main electrode 1 for exciting surface acoustic wave; reflection electrodes 9L or the like disposed on the right and left sides of the main electrode 1; and input/output ports 8A and 8B for signal input/output of the main electrode 1. These are collected on the same side of the detection section while the drawing directions are aligned. The main electrode 1 includes a first finger-like electrode 3 and second finger-like electrode 4 that have different signal phases. One finger part 3a of the first finger-like electrode 3 is drawn to the side having a base part 41 of the second finger-like electrode 4 and is connected to the first port 8A.
申请公布号 JP2014071050(A) 申请公布日期 2014.04.21
申请号 JP20120218825 申请日期 2012.09.28
申请人 TAMAGAWA SEIKI CO LTD 发明人 TANAKA HIROSHI;MATSUI TOMOHIRO;YANAI MASAKI
分类号 G01P15/08;G01P15/18 主分类号 G01P15/08
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