CONDENSATION PRODUCT SOLUTION FOR TRENCH FILLING, AND METHOD FOR MANUFACTURING TRENCH-FILLING FILM

摘要

PROBLEM TO BE SOLVED: To provide a condensation product solution for trench filling which makes possible to suppress the occurrence of a void in a trench at the time of producing a coating film by baking, and to provide a method for manufacturing a trench-filling film.SOLUTION: A condensation product solution for trench filling comprises: a condensation product of a polysiloxane compound and a silica particle; and organic solvent. The polysiloxane compound originates from a silane compound expressed by the general formula (1): RSiX(1). The organic solvent includes, to a total of 100 mass% of the organic solvent, 50-99 mass% of organic solvent (A) having a boiling point below 130°C, and 1-50 mass% of organic solvent (B) having a boiling point of 130°C or higher.