| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of improving detection accuracy of acceleration, while contributing to miniaturization of a device and increasing a degree of freedom in shape.SOLUTION: A first sensor 21 is constituted as a biaxial acceleration sensor in which a spring 43 is expanded and contracted in response to the accelerations toward Y and Z directions and has rigidity for the acceleration toward an X direction so as to be regulated in expansion and contraction. Thereby, the accelerations in the Y and Z directions are detected from the change of the electrostatic capacitances of a weight portion 24 fluctuating according to the acceleration and first to third fixed electrodes 28 and 29. The acceleration sensor has a second sensor constituted similarly as the first sensor 21, and a triaxial acceleration sensor is constituted by detecting the accelerations toward the X and Z directions by the second sensor. |
