发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND ADHESIVE SHEET
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method which enables a semiconductor device to be simply manufactured when the semiconductor device is manufactured by mounting a work on wiring formed on a base and subsequently separating the work with the wiring from the base.SOLUTION: A manufacturing method of a semiconductor device having a structure in which a work is mounted on wiring comprises: a process of preparing an adhesive sheet in which a first adhesive layer and a second layer having an adhesive force after being attached to a base, which is lower than that of the first adhesive layer are layered; a process of laminating the adhesive sheet on the base; a process of forming wiring on the adhesive sheet after being attached to the base; a process of mounting a work on the wiring; and a process of separating from the base, the work with the wiring after being mounted.
申请公布号 JP2014072441(A) 申请公布日期 2014.04.21
申请号 JP20120218411 申请日期 2012.09.28
申请人 NITTO DENKO CORP 发明人 UENDA DAISUKE;ISHII ATSUSHI
分类号 H01L23/12;C09J7/02;H01L21/60 主分类号 H01L23/12
代理机构 代理人
主权项
地址