发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device which allows for further enhancement of productivity.SOLUTION: A cutting device 2 comprises: first cutting means 6 having a first cutting blade 66 for cutting a workpiece 56 held on a holding table 4, and a first spindle 67 to which the first cutting blade is attached; second cutting means 8 having a second cutting blade for cutting the workpiece held on the holding table and a second spindle to which the second cutting blade is attached; and third cutting means 72 having a third cutting blade for cutting the workpiece held on the holding table and a third spindle to which the third cutting blade is attached. The first cutting means, second cutting means and third cutting means are disposed in such a state that the axis lines of the first spindle, second spindle and third spindle are aligned on the same straight line.
申请公布号 JP2014072493(A) 申请公布日期 2014.04.21
申请号 JP20120219676 申请日期 2012.10.01
申请人 DISCO ABRASIVE SYST LTD 发明人 HASHIMOTO HIROKIMI;YOSHIDA MIKI
分类号 H01L21/301 主分类号 H01L21/301
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