IMPEDANCE ADJUSTMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To solve the problem wherein impedance matching using a characteristic parameter indicating a transmission characteristic of an entire impedance adjustment device cannot be performed if a variable frequency type high frequency power supply 1v is used.SOLUTION: An impedance adjustment device 3A is applied to a high frequency power supply system using the variable frequency type high frequency power supply 1v. A characteristic parameter covering part of combinations of position information C about a variable capacitor 21 and output frequency information F about the high frequency power supply 1v is stored in a memory 70. A T parameter acquisition section 130 acquires the characteristic parameter corresponding to current (Cnow,Fnow). An output reflection coefficient computation section 140 computes a reflection coefficient &Ggr;outnow of an output end. On the basis of the above information and a target input reflection coefficient, a target information specification section 180 specifies target combination information that brings the reflection coefficient at the output end closer to the target input reflection coefficient. Impedance matching is performed on the basis of the information.