发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device in which a good quality corundum crystal film is formed.SOLUTION: According to the present embodiment, a semiconductor device formed by a base substrate having a corundum crystal structure, a semiconductor layer having the corundum crystal structure and an insulation film having the corundum crystal structure is provided. A material having the corundum crystal structure includes numerous oxide films and is capable of not only functioning as an insulation film but also achieving a good quality semiconductor layer and insulation film on the base substrate because all of the base substrate, the semiconductor layer and the insulation film has the corundum crystal structure.
申请公布号 JP2014072533(A) 申请公布日期 2014.04.21
申请号 JP20130212623 申请日期 2013.10.10
申请人 ROCA KK 发明人 KANEKO KENTARO;HITORA TOSHIMI;HIRAO TAKASHI
分类号 H01L29/24;C30B29/22;H01L21/20;H01L21/205;H01L21/336;H01L29/78 主分类号 H01L29/24
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