发明名称 POLYSILICON THIN FILM AND MANUFACTURING METHOD THEREOF, ARRAY SUBSTRATE AND DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a polysilicon thin film and a manufacturing method thereof, an array substrate and a display device.SOLUTION: The manufacturing method of the polysilicon thin film comprises the steps of: forming a graphene layer and an amorphous silicon layer which are adjacent; and forming polysilicon by crystallizing amorphous silicon so as to obtain the polysilicon thin film. The polysilicon thin film manufactured by the method possesses good characteristics.
申请公布号 JP2014072518(A) 申请公布日期 2014.04.21
申请号 JP20130147409 申请日期 2013.07.16
申请人 BOE TECHNOLOGY GROUP CO LTD 发明人 SUN TUO
分类号 H01L21/20;G02F1/1368;H01L21/205;H01L21/336;H01L29/786;H01L31/04 主分类号 H01L21/20
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