发明名称 |
POLYSILICON THIN FILM AND MANUFACTURING METHOD THEREOF, ARRAY SUBSTRATE AND DISPLAY DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a polysilicon thin film and a manufacturing method thereof, an array substrate and a display device.SOLUTION: The manufacturing method of the polysilicon thin film comprises the steps of: forming a graphene layer and an amorphous silicon layer which are adjacent; and forming polysilicon by crystallizing amorphous silicon so as to obtain the polysilicon thin film. The polysilicon thin film manufactured by the method possesses good characteristics. |
申请公布号 |
JP2014072518(A) |
申请公布日期 |
2014.04.21 |
申请号 |
JP20130147409 |
申请日期 |
2013.07.16 |
申请人 |
BOE TECHNOLOGY GROUP CO LTD |
发明人 |
SUN TUO |
分类号 |
H01L21/20;G02F1/1368;H01L21/205;H01L21/336;H01L29/786;H01L31/04 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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