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发明名称
单枪多靶材的溅镀机构
摘要
申请公布号
TWM476782
申请公布日期
2014.04.21
申请号
TW102218164
申请日期
2013.09.27
申请人
亮杰科技有限公司
发明人
吴金龙;徐永桓
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
苏春维 新北市永和区中和路429号10楼
主权项
地址
台北市重庆南路1段57号12楼之6 TW
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