| 摘要 |
PROBLEM TO BE SOLVED: To reduce deterioration in photoelectric conversion efficiency of a photoelectric conversion device.SOLUTION: A method of manufacturing a photoelectric conversion device according to one embodiment of the present invention comprises a photoelectric conversion layer forming process of forming a photoelectric conversion layer 3 on a substrate 1, and a transparent electrode forming process of forming a transparent electrode 41 on the photoelectric conversion layer 3. The transparent electrode forming process comprises a moisture supply step of supplying moisture onto the photoelectric conversion layer 3, a heating step of raising the temperature of the substrate 1 to a temperature at which the transparent electrode 41 is to be deposited, and a deposition step of depositing the transparent electrode 41 on the photoelectric conversion layer 3 supplied with the moisture by reacting an alkylzinc-containing compound gas, a dopant-containing compound gas, and water vapor after the heating step. The moisture supply step is performed simultaneously with or before the heating step. |
