| 摘要 |
PROBLEM TO BE SOLVED: To reduce the number of signal lines through which a vacuum valve unit monitoring device outputs a notification signal for notifying occurrence of abnormality in a vacuum valve unit to a subsequent stage.SOLUTION: A plurality of sensors installed for a plurality of vacuum valve units respectively detect detection targets different from each other and output sensor signals, respectively. A vacuum valve unit monitoring device outputs signals for indicating vacuum valve unit equipped with sensors outputting abnormality-indicating sensor signals from individual signal lines respectively, and outputs signals for indicating the kinds of detection targets of the sensor outputting abnormality-indicating sensor signals from individual signal lines respectively. When there is an abnormality-indicating sensor signal, the vacuum valve unit monitoring device outputs the signal from a signal line selected so as to indicate a vacuum valve unit having the sensor outputting this sensor signal, and outputs the signal from a signal line selected so as to indicate the kind of the detection target of the sensor outputting this signal. |
