| 摘要 |
<p>The present invention relates to an exhaust gas access hole for a semiconductor and an LCD. More particularly, the present invention has a double reinforcement structure where a blocking part prevents the exhaust gas which is transferred into an exhaust duct or an exhaust pipe from being discharged to outside. The present invention prevents static pressure hunting, blocks a risk element between a checking and a cleansing process, improves process condition and process efficiency, and easily attaches/detaches a cover device by applying a looseness prevention function combination system to the cover device without using an existing coupler, jig, and so on. Thereby, a safety accident element such as an existing component deviation, dropping, destruction, etc is completely removed.</p> |
