| 摘要 |
PROBLEM TO BE SOLVED: To provide a hermetically sealed structure capable of improving the reliability of hermetic sealing and reducing the manufacturing cost, and to provide a method for manufacturing the hermetically sealed structure.SOLUTION: A hermetically sealed structure 1 comprises: a substrate 20 for mounting a functional element 10; a cap 30 which is arranged on the substrate 20 while covering the functional element and on which a hole 34 for evacuation is formed; a pin 40 formed so that it can be inserted or pressed into the hole 34 during the evacuation. A method for manufacturing the hermetically sealed structure comprises: an element mounting step for mounting the functional element on the substrate 20; a cap bonding step for bonding the cap 30, on which the hole 34 for evacuation is formed so as to cover the functional element 10, on the substrate 20; an evacuation step for evacuating the inside of a vacuum chamber; a sealing step for positioning, inserting or pressing in the pin 40 in a state where a predetermined degree of vacuum is maintained. |
