| 摘要 |
PROBLEM TO BE SOLVED: To provide a variable wavelength interference filter capable of preventing a set of wiring thereof from being damaged or broken by cut edge portions, and to provide a manufacturing method for the same and an optical device having the same.SOLUTION: A variable wavelength interference filter includes: a first substrate 10; a second substrate 20 having support sections for supporting the first substrate; a first optical film 30 formed on the first substrate; first drive electrodes 50 provided on the first substrate outside the first optical film in a planar view from a thickness direction of the first and second substrates; a second optical film 40 formed on the second substrate; and second drive electrodes 60 provided on the second substrate facing the first drive electrodes in a planar view. The second substrate has external connection electrodes 61b, 62b extending outside the support sections and an electrode forming surface 20e on which the external connection electrodes are formed. A plurality of protruded portions 20g, 20h, 20j, 20k protruding from the electrode forming surface are arrayed along a direction that crosses a direction in which the external connection electrodes extend. |
