| 摘要 |
PROBLEM TO BE SOLVED: To provide a dual-axis type galvanomirror device that facilitates position adjustments of a scanning part and an encoder part, and enables a shape of the scanning part to be a simple configuration.SOLUTION: A dual-axis type galvanomirror device is configured so as to comprise: a first scanning part that scans laser light; a second scanning part that scans the laser light scanned by the first scanning part; a base member that has a first drive part of the first scanning part and a second drive part of the second scanning part attached so as to be capable of two-dimensionally scanning the laser light; a first encoder part that is provided separately from the first scanning part, detects a rotation angle of a first rotary shaft to be rotated by the first drive part and is attached to the base member so as to be orthogonal to a shaft direction of the first rotary shaft; and a second encoder part that is provided separately from the second scanning part, detects a rotation angle of a second rotary shaft to be rotated by the second drive part and is attached to the base member so as to be orthogonal to a shaft direction of the second rotary shaft. |
