ANTI-FUSE ELEMENT AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an anti-fuse element which can easily secure insulation properties before breakdown and in which short-circuiting resistance after breakdown is low.SOLUTION: An anti-fuse element 100 comprises: a substrate 1; a lower electrode layer 3 as a first electrode layer laminated on the substrate 1; an anti-fuse layer 5 provided in contact with the lower electrode layer 3; an insulating layer 7 formed in a prescribed pattern on the anti-fuse layer 5; and an upper electrode layer 9 provided in contact with the anti-fuse layer 5 as a second electrode layer. The anti-fuse layer 5 is composed of a metal fine particle dispersion complex with a matrix resin 10 and a metal fine particle 20 fixed in the matrix resin 10.