DELAMINATION DRYING APPARATUS AND METHOD

摘要

A delamination drying apparatus of a substrate is provided. A chamber for receiving the substrate is provided. A chuck is in the substrate and supports and clamps the substrate. A temperature control part controls the temperature of the substrate and cools the substrate. A vacuum pump is hydraulically connected to the chamber. A tilting mechanism makes the chuck lean at an angle of 90 degrees or more. [Reference numerals] (AA) Start; (BB) End; (S104) Form a feature on a substrate; (S108) Wet the substrate; (S112) Move a liquid with dry chemicals; (S116) Place the substrate in a drying chamber; (S120) Provide a controlled atmosphere; (S124) Cool the dry chemicals; (S128) Delaminate solid dry chemicals; (S132) Remove the delaminated solid dry chemicals; (S136) Remove the substrate from the chamber