发明名称 GAS-LIQUID MIXING METHOD, GAS-LIQUID MIXING DEVICE, AND RINSING METHOD USING GAS-LIQUID MIXED FLUID CONTAINING FINE BUBBLES
摘要 PROBLEM TO BE SOLVED: To provide gas-liquid mixing method and a gas-liquid mixing device capable of suppressing the fusion and coalescence of bubbles produced in a gas-liquid mixed fluid, into which a gas is injected into a liquid, and efficiently generating as many fine bubbles such as micro-bubbles or nano-bubbles as possible relative to the entire quantity of the gas-liquid mixed fluid, and a rinsing method using the gas-liquid mixed fluid containing the fine bubbles.SOLUTION: Fine air bubbles are produced by lowering the pressure of the gas-liquid mixed fluid to a level lower than atmospheric pressure, which was prepared by injecting gases into a liquid, and then by raising the pressure of the gas-liquid mixed fluid to atmospheric pressure or higher.
申请公布号 JP2014069160(A) 申请公布日期 2014.04.21
申请号 JP20120219126 申请日期 2012.10.01
申请人 MITSUBISHI ELECTRIC CORP 发明人 YASUNAGA NOZOMI;FURUKAWA SEIJI
分类号 B01F3/04;B01F1/00;B08B3/10;H01L21/304 主分类号 B01F3/04
代理机构 代理人
主权项
地址