| 摘要 |
PROBLEM TO BE SOLVED: To inspect with high sensitivity defects with various features, avoiding an effect depending on the type of defects, a direction of a defective shape, or a direction of a background pattern.SOLUTION: A defect inspection device comprises: an irradiating unit including an objective pupil optical unit 103 through which illumination light that is concentrated into a linear shape by a first light concentrating unit passes, and an objective lens 102 through which the illumination light that passed through the objective pupil optical unit 103 passes; an irradiation position control unit for controlling a passage position of the illumination light from the objective pupil optical unit 103 disposed on the pupil plane of the objective lens 102; a detecting unit including a second light concentrating unit for concentrating light generated from a sample 2 irradiated by the irradiating unit, a specular reflected light shielding unit for shielding the specular reflected light of the sample and the light component generated in a vicinity of the pupil plane, and an image forming unit for forming an image, in a detecting device, of the light not shielded by the specular reflected light shielding unit that was concentrated by the second light concentrating unit; and a defect determination unit for detecting defects on the sample face on the basis of a signal of the image that is formed by the image forming unit. |
