SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

摘要

A semiconductor device according to an embodiment of the present invention includes: a semiconductor substrate, edge active pillars which protrude from the upper surface of the semiconductor substrate in a vertical direction, a center active pillar between the edge active pillars, a burying word lines which are arranged between the center active pillar and the edge active pillars, and a burying bit line which is arranged in the center active pillar and arranged in a diagonal direction to the burying word lines. The upper surface of the burying bit line is lower than the upper surface of the center active pillar. The lower surface of the burying bit line is higher than the upper surface of the burying word lines.