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发明名称
光阻组成物用高分子化合物的合成方法
摘要
申请公布号
TWI435175
申请公布日期
2014.04.21
申请号
TW097127796
申请日期
2008.07.22
申请人
信越化学工业股份有限公司 日本
发明人
武田隆信;渡边保
分类号
G03F7/038;G03F7/039;C08F6/04
主分类号
G03F7/038
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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