发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having high arrangement efficiency of through vias.SOLUTION: In a semiconductor device in which semiconductor chips are stacked and adjacent semiconductor chips are electrically connected by a plurality of through vias 805, each semiconductor chip has a core circuit and a plurality of IO circuits disposed therearound, the through vias 805 are disposed in the core circuit, and the arrangement pitch of the through vias 805 is integral multiple of the cell pitch of a library constituting the core circuit.
申请公布号 JP2014072499(A) 申请公布日期 2014.04.21
申请号 JP20120219919 申请日期 2012.10.02
申请人 HITACHI LTD 发明人 FURUTA FUTOSHI;OSADA KENICHI
分类号 H01L21/822;H01L21/3205;H01L21/768;H01L21/82;H01L23/522;H01L25/065;H01L25/07;H01L25/18;H01L27/04 主分类号 H01L21/822
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