| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of preferably performing temperature control of a suctioned object suctioned on a suctioning side surface (a first main surface) of the electrostatic chuck.SOLUTION: A heat insulation groove 15 is formed between a center part 13 and an outer peripheral part 17 at the suctioning surface 3 side of a ceramic insulation plate 7. The outer peripheral part 17 includes an outer periphery heater 51 and an outer periphery cooling gas supply passage 53. In other words, the center part 13 and the outer peripheral part 17 are thermally and substantially separated by the heat insulation groove 15. Besides, the outer peripheral part 17 is independently heated by the outer periphery heater 51. Further, the outer peripheral part 17 and an outer peripheral ring 19 are independently cooled by a cooling gas supplied by the outer periphery cooling gas supply passage 53. |
